<SEC-DOCUMENT>0001258897-20-000777-index.html : 20200212
<SEC-HEADER>0001258897-20-000777.hdr.sgml : 20200212
<ACCEPTANCE-DATETIME>20200212102626
ACCESSION NUMBER:		0001258897-20-000777
CONFORMED SUBMISSION TYPE:	SC 13G/A
PUBLIC DOCUMENT COUNT:		1
FILED AS OF DATE:		20200212
DATE AS OF CHANGE:		20200212

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		SC 13G/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	005-39482
		FILM NUMBER:		20600920

	BUSINESS ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		4809675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			DIMENSIONAL FUND ADVISORS LP
		CENTRAL INDEX KEY:			0000354204
		STANDARD INDUSTRIAL CLASSIFICATION:	UNKNOWN SIC - 0000 [0000]
		IRS NUMBER:				222370029
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13G/A

	BUSINESS ADDRESS:	
		STREET 1:		6300 BEE CAVE ROAD
		STREET 2:		BUILDING ONE
		CITY:			AUSTIN
		STATE:			TX
		ZIP:			78746
		BUSINESS PHONE:		(512) 306-7400

	MAIL ADDRESS:	
		STREET 1:		6300 BEE CAVE ROAD
		STREET 2:		BUILDING ONE
		CITY:			AUSTIN
		STATE:			TX
		ZIP:			78746

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	DIMENSIONAL FUND ADVISORS INC
		DATE OF NAME CHANGE:	19920929
</SEC-HEADER>
<DOCUMENT>
<TYPE>SC 13G/A
<SEQUENCE>1
<FILENAME>dfs039.htm
<DESCRIPTION>SCHEDULE 13G/A
<TEXT>
Document 1 - file: dfs039.htm

</DOCUMENT>
</SEC-DOCUMENT>