<SEC-DOCUMENT>0001258897-15-001055-index.html : 20150205
<SEC-HEADER>0001258897-15-001055.hdr.sgml : 20150205
<ACCEPTANCE-DATETIME>20150205093124
ACCESSION NUMBER:		0001258897-15-001055
CONFORMED SUBMISSION TYPE:	SC 13G/A
PUBLIC DOCUMENT COUNT:		1
FILED AS OF DATE:		20150205
DATE AS OF CHANGE:		20150205

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			RUDOLPH TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001094392
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				223531208
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13G/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	005-58091
		FILM NUMBER:		15578135

	BUSINESS ADDRESS:	
		STREET 1:		PO BOX 1000
		STREET 2:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836
		BUSINESS PHONE:		9736911300

	MAIL ADDRESS:	
		STREET 1:		PO BOX 1000
		STREET 2:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			DIMENSIONAL FUND ADVISORS LP
		CENTRAL INDEX KEY:			0000354204
		STANDARD INDUSTRIAL CLASSIFICATION:	UNKNOWN SIC - 0000 [0000]
		IRS NUMBER:				222370029
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13G/A

	BUSINESS ADDRESS:	
		STREET 1:		6300 BEE CAVE ROAD
		STREET 2:		BUILDING ONE
		CITY:			AUSTIN
		STATE:			TX
		ZIP:			78746
		BUSINESS PHONE:		(512) 306-7400

	MAIL ADDRESS:	
		STREET 1:		6300 BEE CAVE ROAD
		STREET 2:		BUILDING ONE
		CITY:			AUSTIN
		STATE:			TX
		ZIP:			78746

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	DIMENSIONAL FUND ADVISORS INC
		DATE OF NAME CHANGE:	19920929
</SEC-HEADER>
<DOCUMENT>
<TYPE>SC 13G/A
<SEQUENCE>1
<FILENAME>rrd419.htm
<DESCRIPTION>SCHEDULE 13G/A
<TEXT>
Document 1 - file: rrd419.htm

</DOCUMENT>
</SEC-DOCUMENT>