Exhibit 8.1

Subsidiaries

ASM Pacific Holding BV

ASM America, Inc.

ASM Front-End Manufacturing Singapore Pte Limited

ASM Japan K.K.

ASM Microchemistry Oy

ASM Genitech Korea Ltd

ASM Services & Support Malaysia SDN BDH

ASM Europe B.V.

ASM Netherlands Holding B.V.

ASM IP Holding B.V.

ASM France S.A.R.L. (subsidiary of ASM Netherlands Holding B.V.)

ASM Belgium NV (subsidiary of ASM Netherlands Holding B.V.)

ASM United Kingdom Sales B.V. (subsidiary of ASM Netherlands Holding B.V.)

ASM Germany Sales B.V. (subsidiary of ASM Netherlands Holding B.V.)

ASM Italia S.r.l. (subsidiary of ASM Netherlands Holding B.V.)

ASM Services and Support Ireland Ltd. (subsidiary of ASM Netherlands Holding B.V.)

ASM Services and Support Israel Ltd. (subsidiary of ASM Netherlands Holding B.V.)

ASM China Limited

ASM Wafer Process Equipment Singapore Pte Limited

ASM Front-End Sales & Services Taiwan Co., Ltd.