EQUITY, LONG-TERM INCENTIVE COMPENSATION PLANS AND NON-CONTROLLING INTEREST - Non-controlling Interest (Details)	Sep. 30, 2020
Orbograph
Noncontrolling Interest [Line Items]
Non-controlling interest, ownership	94.00%
OLTS
Noncontrolling Interest [Line Items]
Non-controlling interest, ownership	97.00%
PixCell
Noncontrolling Interest [Line Items]
Non-controlling interest, ownership	52.00%