Goodwill and Purchased Intangible Assets - Schedule of Goodwill (Details) $ in Thousands	6 Months Ended
	Dec. 31, 2016 USD ($) reporting_unit	Jun. 30, 2014 USD ($)
Goodwill
Number of reporting units | reporting_unit	4
Goodwill
Balance as of June 30, 2016	$ 335,177
Goodwill adjustment	(7)
Balance as of December 31, 2016	335,170
Accumulated impairment loss		$ 277,600
Wafer Inspection
Goodwill
Balance as of June 30, 2016	281,026
Goodwill adjustment	(7)
Balance as of December 31, 2016	281,019
Patterning
Goodwill
Balance as of June 30, 2016	53,255
Goodwill adjustment	0
Balance as of December 31, 2016	53,255
Others
Goodwill
Balance as of June 30, 2016	896
Goodwill adjustment	0
Balance as of December 31, 2016	$ 896