-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 TQSvHoi5ZD82dK1sP57ks+r69otSEjWoq7Mw0lgGkFyOae87qmJ6Oy3/Os2CIGaI
 IMEmbIA84qnlA7VfH8I2bA==

<SEC-DOCUMENT>0000319201-03-000087.txt : 20030814
<SEC-HEADER>0000319201-03-000087.hdr.sgml : 20030814
<ACCEPTANCE-DATETIME>20030814185426
ACCESSION NUMBER:		0000319201-03-000087
CONFORMED SUBMISSION TYPE:	5
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20030630
FILED AS OF DATE:		20030814

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			KLA TENCOR CORP
		CENTRAL INDEX KEY:			0000319201
		STANDARD INDUSTRIAL CLASSIFICATION:	OPTICAL INSTRUMENTS & LENSES [3827]
		IRS NUMBER:				042564110
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			0630

	BUSINESS ADDRESS:	
		STREET 1:		160 RIO ROBLES
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
		BUSINESS PHONE:		4084344200

	MAIL ADDRESS:	
		STREET 1:		160 RIO ROBLES
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95161-9055

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	KLA INSTRUMENTS CORP
		DATE OF NAME CHANGE:	19920703

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			TOMPKINS JON D
		CENTRAL INDEX KEY:			0001196899

	FILING VALUES:
		FORM TYPE:		5
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-09992
		FILM NUMBER:		03849216

	BUSINESS ADDRESS:	
		STREET 1:		KLA TENCOR
		STREET 2:		160 RIO ROBLES
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
		BUSINESS PHONE:		4088753000

	MAIL ADDRESS:	
		STREET 1:		KLA TENCOR
		STREET 2:		160 RIO ROBLES
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
</SEC-HEADER>
<DOCUMENT>
<TYPE>5
<SEQUENCE>1
<FILENAME>primary_doc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>

<ownershipDocument>

    <schemaVersion>X0201</schemaVersion>

    <documentType>5</documentType>

    <periodOfReport>2003-06-30</periodOfReport>


    <notSubjectToSection16>0</notSubjectToSection16>

    <form3HoldingsReported>0</form3HoldingsReported>

    <form4TransactionsReported>0</form4TransactionsReported>

    <issuer>
        <issuerCik>0000319201</issuerCik>
        <issuerName>KLA TENCOR CORP</issuerName>
        <issuerTradingSymbol>klac</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001196899</rptOwnerCik>
            <rptOwnerName>TOMPKINS JON D</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O KLA-TENCOR</rptOwnerStreet1>
            <rptOwnerStreet2>160 RIO ROBLES</rptOwnerStreet2>
            <rptOwnerCity>SAN JOSE</rptOwnerCity>
            <rptOwnerState>CA</rptOwnerState>
            <rptOwnerZipCode>95134</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>

        <nonDerivativeHolding>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <transactionCoding>
                <transactionFormType></transactionFormType>
            </transactionCoding>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>31416</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeHolding>

    </nonDerivativeTable>

    <derivativeTable>

        <derivativeHolding>
            <securityTitle>
                <value>Non-Qualified Stock Option</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>37.05</value>
            </conversionOrExercisePrice>
            <transactionCoding>
                <transactionFormType></transactionFormType>
            </transactionCoding>
            <exerciseDate>
                <value>2002-11-08</value>
            </exerciseDate>
            <expirationDate>
                <value>2012-11-08</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>10000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>10000</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>

    </derivativeTable>


    <remarks>Form 5 being filed to voluntarily report all holdings</remarks>

    <ownerSignature>
        <signatureName>Jon D. Tompkins</signatureName>
        <signatureDate>2003-08-14</signatureDate>
    </ownerSignature>

</ownershipDocument>

</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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