Accrued Liabilities and Other Current Liabilities, and Other Long-Term Liabilities (Details) - USD ($) $ in Thousands	Dec. 31, 2016	Dec. 31, 2015
Accrued Liabilities, Current [Abstract]
Accrued expenses	$ 33,947	$ 34,108
Compensation and payroll taxes	23,720	23,867
Equipment purchases	6,377	13,060
Accrued pricing adjustments	3,817	3,767
Accrued professional services	2,645	2,082
Other	1,056	917
Accrued Liabilities, Current, Total	71,562	77,801
Liabilities, Noncurrent [Abstract]
Accrued defined benefit plan	30,515	30,406
Unrecognized tax benefits	15,340	20,933
Deferred grant and subsidy	18,259	20,361
Income tax contingencies	8,163	10,782
Deferred compensation	6,433	5,600
Other	2,663	2,071
Other long-term liabilities, Total	$ 81,373	$ 90,153