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Note 1 - Summary of Significant Accounting Policies (Details Textual) - USD ($)
3 Months Ended 6 Months Ended
Oct. 01, 2014
Jun. 27, 2015
Jun. 28, 2014
Jun. 27, 2015
Jun. 28, 2014
Dec. 27, 2014
Semiconductor Equipment [Member]            
Reporting Unit, Percentage of Fair Value in Excess of Carrying Amount 35.00%          
Goodwill, Impairment Loss $ 0          
Allowance for Doubtful Accounts Receivable, Current   $ 100,000   $ 100,000   $ 200,000
Foreign Currency Transaction Gain (Loss), Realized   $ 600,000   $ 400,000    
Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount   843,000 2,231,000 940,000 2,257,000  
Deferred Revenue   $ 12,100,000   $ 12,100,000   10,700,000
Deferred Profit   7,648,000   7,648,000   6,941,000
Accumulated Other Comprehensive Income (Loss), Net of Tax   $ (16,379,000)   $ (16,379,000)   $ (10,714,000)