Exhibit 21

SUBSIDIARIES OF COHU, INC.

		PLACE OF
LEGAL ENTITY NAME		INCORPORATION
Delta Design, Inc. (1)		Delaware
FRL, Incorporated		California
Broadcast Microwave Services, Inc. (2)		California
Delta Design (Littleton), Inc.		Delaware
Cohu Foreign Sales Ltd.		Barbados
(1)	Delta Design, Inc. owns the following subsidiaries:
	Delta Design Singapore PTE LTD	Singapore
	Delta Design Philippines LLC	Delaware
	Cohu S.A.	Costa Rica
	Delta Design Europe GmbH	Germany
	Rasco GmbH	Germany
	Rosenheim Automation Systems Corporation	California
(2)	Broadcast Microwave Services, Inc. owns the following subsidiaries:
	Broadcast Microwave Services Europe Holding GmbH	Germany
	Broadcast Microwave Services Europe Verwaltungs GmbH	Germany
	Broadcast Microwave Services Europe GmbH & Co. KG	Germany