Property, Plant and Equipment (Details) - USD ($) $ in Thousands	Jun. 30, 2022	Dec. 31, 2021
Property, Plant and Equipment
Property, plant and equipment, gross	$ 382,900	$ 344,100
Less: accumulated depreciation	(115,100)	(104,000)
Property, plant and equipment, net	267,816	240,091
Systems and related equipment
Property, Plant and Equipment
Property, plant and equipment, gross	326,100	306,600
Systems in process
Property, Plant and Equipment
Property, plant and equipment, gross	35,800	19,900
Computer hardware and software
Property, Plant and Equipment
Property, plant and equipment, gross	1,400	1,200
Machinery and equipment
Property, Plant and Equipment
Property, plant and equipment, gross	5,400	5,400
Vehicles
Property, Plant and Equipment
Property, plant and equipment, gross	8,800	5,600
Buildings
Property, Plant and Equipment
Property, plant and equipment, gross	4,400	4,400
Land
Property, Plant and Equipment
Property, plant and equipment, gross	600	600
Furniture and fixtures
Property, Plant and Equipment
Property, plant and equipment, gross	$ 400	$ 400