The Company and Basis of Presentation - Additional Information (Details) - USD ($) $ in Millions	Jun. 16, 2020	Sep. 30, 2020
Follow-on Public Offering
Significant Accounting Policies [Line Items]
Proceeds from public offering, net of underwriting discounts and commissions	$ 45.8
Payments for underwriting discounts and commissions	2.7
Deferred offering costs	$ 0.3
SiTime Corporation | Follow-on Public Offering
Significant Accounting Policies [Line Items]
Issuance of common stock upon follow-on public offering net of underwriting discounts and commissions and deferred offerings costs, Shares	1,525,000
MegaChips | Follow-on Public Offering
Significant Accounting Policies [Line Items]
Issuance of common stock upon follow-on public offering net of underwriting discounts and commissions and deferred offerings costs, Shares	2,500,000
MegaChips | SiTime Corporation
Significant Accounting Policies [Line Items]
Percentage of outstanding common stock held		44.30%