Amount of tangible assets (assets excluding intangible assets) acquired at the acquisition date.

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Amount of assets acquired at the acquisition date.

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The amount of identifiable intangible assets recognized as of the acquisition date.

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Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

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Note 1 - Organization and Significant Accounting Policies - Purchase Price Allocation for Hillcrest Labs Acquisition (Details) - USD ($) $ in Thousands	Dec. 31, 2021	Dec. 31, 2020	Dec. 31, 2019	Aug. 31, 2019	Jul. 19, 2019
Intangible assets				$ 7,063
Goodwill	$ 74,777	$ 51,070	$ 51,070
Total assets				$ 10,000
Acquisition of Hillcrest Labs [Member]
Tangible assets (including inventory, property and equipment and other)					$ 681
Goodwill					4,458
Total assets					11,204
Acquisition of Hillcrest Labs [Member] \| Research and Development Tools [Member]
Intangible assets					2,475
Acquisition of Hillcrest Labs [Member] \| Customer Relationships [Member]
Intangible assets					3,518
Acquisition of Hillcrest Labs [Member] \| Customer Backlog [Member]
Intangible assets					$ 72