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Filing Detail
Form 3 - Initial statement of beneficial ownership of securities:
SEC Accession No. 0001101302-24-000061
Filing Date
2024-09-06
Accepted
2024-09-06 13:33:48
Documents
2
Period of Report
2024-09-05

Document Format Files

Seq Description Document Type Size
1 FORM 3 wk-form3_1725644022.html 3  
1 FORM 3 wk-form3_1725644022.xml 3 2167
2 EX-24 poa_puma.txt EX-24 3404
  Complete submission text file 0001101302-24-000061.txt   6995
Mailing Address 129 CONCORD ROAD BILLERICA MA 01821
Business Address 129 CONCORD ROAD BILLERICA MA 01821 9784366500
ENTEGRIS INC (Issuer) CIK: 0001101302 (see all company filings)

IRS No.: 411941551 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3089 Plastics Products, NEC
(CF Office: 08 Industrial Applications and Services)

Mailing Address AXCELIS TECHNOLOGIES INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address
PUMA MARY G (Reporting) CIK: 0001158015 (see all company filings)

Type: 3 | Act: 34 | File No.: 001-32598 | Film No.: 241283856