Revenue - Disaggregation of Revenue (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2023	Mar. 31, 2022
Disaggregation of Revenue [Line Items]
Total revenue	$ 54,091	$ 64,459
Point in time
Disaggregation of Revenue [Line Items]
Total revenue	40,272	48,215
Over time
Disaggregation of Revenue [Line Items]
Total revenue	13,819	16,244
North America
Disaggregation of Revenue [Line Items]
Total revenue	29,103	35,144
China
Disaggregation of Revenue [Line Items]
Total revenue	3,646	7,139
Rest of World
Disaggregation of Revenue [Line Items]
Total revenue	21,342	22,176
Industrial
Disaggregation of Revenue [Line Items]
Total revenue	19,902	23,996
Microfabrication
Disaggregation of Revenue [Line Items]
Total revenue	13,058	17,319
Aerospace and Defense
Disaggregation of Revenue [Line Items]
Total revenue	$ 21,131	$ 23,144