Revenue - Disaggregation of Revenue (Details) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Sep. 30, 2022	Sep. 30, 2021	Sep. 30, 2022	Sep. 30, 2021
Disaggregation of Revenue [Line Items]
Total revenue	$ 60,093	$ 72,235	$ 185,379	$ 202,693
Point in time
Disaggregation of Revenue [Line Items]
Total revenue	45,268	53,070	138,931	150,187
Over time
Disaggregation of Revenue [Line Items]
Total revenue	14,825	19,165	46,448	52,506
North America
Disaggregation of Revenue [Line Items]
Total revenue	32,793	37,430	103,619	101,659
China
Disaggregation of Revenue [Line Items]
Total revenue	5,230	13,709	17,041	48,045
Rest of World
Disaggregation of Revenue [Line Items]
Total revenue	22,070	21,096	64,719	52,989
Industrial
Disaggregation of Revenue [Line Items]
Total revenue	22,217	26,737	68,112	73,044
Microfabrication
Disaggregation of Revenue [Line Items]
Total revenue	17,682	17,695	51,416	53,184
Aerospace and Defense
Disaggregation of Revenue [Line Items]
Total revenue	$ 20,194	$ 27,803	$ 65,851	$ 76,465