Exhibit 21.01

Subsidiaries of Registrant

Name of Entity	Jurisdiction of Incorporation or Organization
Cimetrix Incorporated	Nevada
Cimetrix International, Inc.	Nevada
Cimetrix Japan KK	Japan
Cimetrix Software (Shanghai) Co., Ltd.	China
PDF Solutions Asia Services, Inc.	Delaware
PDF Solutions Canada Ltd.	Canada
PDF Solutions GmbH	Germany
PDF Solutions International Services, Inc.	Delaware
PDF Solutions KK	Japan
PDF Solutions Pacific Services, Inc.	Delaware
PDF Solutions SARL	France
PDF Solutions Semiconductor Technology (Korea) Limited	Korea
PDF Solutions Semiconductor Technology (Shanghai) Co. Ltd.	China
PDF Solutions Semiconductor Technology Taiwan Ltd.	Taiwan