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Note 4 - Business Combination - Fair Values of Assets Acquired and Liabilities Assumed and the Related Useful Lives (Details) - USD ($)
$ in Thousands
3 Months Ended
Mar. 31, 2021
Dec. 31, 2020
Goodwill $ 15,305 $ 15,774
Cimetrix Incorporated [Member]    
Fair value of tangible assets (including cash of $5,900) 8,403  
Goodwill 13,012  
Total assets acquired 41,214  
Accounts payable and accrued expenses 1,437  
Deferred revenue 391  
Operating lease liabilities 132  
Deferred tax liabilities 1,743  
Total liabilities assumed 3,703  
Total purchase price allocation 37,511  
Cimetrix Incorporated [Member] | In Process Research and Development [Member]    
Fair value of indefinite-lived intangible assets 3,635  
Developed Technology Rights [Member] | Cimetrix Incorporated [Member]    
Fair value of cash 5,900  
Fair value of finite-lived intangible assets $ 12,541  
Finite-lived intangible assets, amortization period (Year) 8 years  
Customer Relationships [Member] | Cimetrix Incorporated [Member]    
Fair value of finite-lived intangible assets $ 1,967  
Finite-lived intangible assets, amortization period (Year) 10 years  
Noncompete Agreements [Member] | Cimetrix Incorporated [Member]    
Fair value of finite-lived intangible assets $ 848  
Finite-lived intangible assets, amortization period (Year) 3 years  
Trademarks and Trade Names [Member] | Cimetrix Incorporated [Member]    
Fair value of finite-lived intangible assets $ 808  
Finite-lived intangible assets, amortization period (Year) 10 years