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Note 4 - Business Combination (Details Textual) - USD ($)
$ in Thousands
1 Months Ended 12 Months Ended
Dec. 01, 2020
Dec. 31, 2020
Dec. 31, 2020
Dec. 31, 2019
Payments to Acquire Businesses, Net of Cash Acquired, Total     $ 28,580 $ 2,660
Cimetrix Incorporated [Member]        
Business Combination, Consideration Transferred, Total $ 35,000      
Payments to Acquire Businesses, Net of Cash Acquired, Total   $ 28,600    
Business Combination, Holdback Amount   3,500    
Business Combination, Acquired Receivables, Gross Contractual Amount   1,600 1,600  
Business Combination, Estimated Cash Payout to Certain Employees     1,400  
Business Combination, Acquisition Related Costs   1,600    
Cimetrix Incorporated [Member] | Accrued Compensation and Related Benefits [Member]        
Business Combination, Accrued Estimated Cash Payout to Certain Employees   $ 300 $ 300