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Filing Detail
Form ARS - Annual Report to Security Holders:
SEC Accession No. 9999999997-10-007705
Filing Date
2010-03-25
Accepted
2010-03-31 15:56:44
Documents
1
Period of Report
2009-12-31
Effectiveness Date
2010-03-25

Document Format Files

Seq Description Document Type Size
1 AUTO-GENERATED PAPER DOCUMENT 9999999997-10-007705.paper ARS 290
  Scanned paper document scanned.pdf   5775099
  Complete submission text file 9999999997-10-007705.txt   1827
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: ARS | Act: 34 | File No.: 000-30941 | Film No.: 10011031
SIC: 3559 Special Industry Machinery, NEC