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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 LvNu0cUdHfk4jfIMr/EWRta0EhpUTm2dGOxKGa8m6We5TZRP6O5lgfIrm4sHs/Rx
 B3Mw0naLwY0ks9JSfq5BVg==

<SEC-DOCUMENT>9999999997-09-017585.txt : 20090421
<SEC-HEADER>9999999997-09-017585.hdr.sgml : 20090421
<ACCEPTANCE-DATETIME>20090421155427
<PAPER>
ACCESSION NUMBER:		9999999997-09-017585
CONFORMED SUBMISSION TYPE:	ARS
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20081231
FILED AS OF DATE:		20090407
DATE AS OF CHANGE:		20090421
EFFECTIVENESS DATE:		20090407

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		ARS
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		09010827

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978 232 4001

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
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<FILENAME>9999999997-09-017585.paper
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This document was generated as part of a paper submission.
Please reference the Document Control Number 09010827 for access to the original document.
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