SEC Seal
SEC Banner
Search the Next-Generation EDGAR System
Filing Detail
Form ARS - Annual Report to Security Holders:
SEC Accession No. 9999999997-05-016780
Filing Date
2005-04-04
Accepted
2005-04-06 10:01:48
Documents
1
Period of Report
2004-12-31
Effectiveness Date
2005-04-04

Document Format Files

Seq Description Document Type Size
1 AUTO-GENERATED PAPER DOCUMENT 9999999997-05-016780.paper ARS 150
  Scanned paper document scanned.pdf   5073070
  Complete submission text file 9999999997-05-016780.txt   1725
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: ARS | Act: 34 | File No.: 000-30941 | Film No.: 05049347
SIC: 3559 Special Industry Machinery, NEC