SEC Seal
SEC Banner
Search the Next-Generation EDGAR System
Filing Detail
Form ARS - Annual Report to Security Holders:
SEC Accession No. 9999999997-03-020161
Filing Date
2003-05-01
Accepted
2003-05-02 10:42:48
Documents
1
Period of Report
2002-12-31
Effectiveness Date
2003-05-01

Document Format Files

Seq Description Document Type Size
1 AUTO-GENERATED PAPER DOCUMENT 9999999997-03-020161.paper ARS 150
  Scanned paper document scanned.pdf   3852405
  Complete submission text file 9999999997-03-020161.txt   1696
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: ARS | Act: 34 | File No.: 000-30941 | Film No.: 03057996
SIC: 3559 Special Industry Machinery, NEC