0001950047-23-003813.txt : 20230907 0001950047-23-003813.hdr.sgml : 20230907 20230907161843 ACCESSION NUMBER: 0001950047-23-003813 CONFORMED SUBMISSION TYPE: 144 PUBLIC DOCUMENT COUNT: 1 FILED AS OF DATE: 20230907 DATE AS OF CHANGE: 20230907 SUBJECT COMPANY: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 FILING VALUES: FORM TYPE: 144 SEC ACT: 1933 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 231242494 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 REPORTING-OWNER: COMPANY DATA: COMPANY CONFORMED NAME: Titinger Jorge CENTRAL INDEX KEY: 0001385162 FILING VALUES: FORM TYPE: 144 BUSINESS ADDRESS: BUSINESS PHONE: 925-290-4124 MAIL ADDRESS: STREET 1: 7005 SOUTHFRONT ROAD CITY: LIVERMORE STATE: CA ZIP: 94551 144 1 primary_doc.xml 144 0001385162 XXXXXXXX LIVE 0001113232 AXCELIS TECHNOLOGIES, INC 000-30941 108 Cherry Hill Drive Beverly MA 01915 978-787-4000 JORGE TITINGER Director Common Morgan Stanley Smith Barney LLC Executive Financial Services

1 New York Plaza 38th Floor New York NY 10004

6881 1220534.58 32817464 09/07/2023 NASDAQ Common 11/15/2020 Restricted stock vesting under a registered plan Issuer N 6881 11/15/2020 Not Applicable Y 09/07/2023 /s/ Jorge Titinger