0001950047-23-000675.txt : 20230516 0001950047-23-000675.hdr.sgml : 20230516 20230516171327 ACCESSION NUMBER: 0001950047-23-000675 CONFORMED SUBMISSION TYPE: 144 PUBLIC DOCUMENT COUNT: 1 FILED AS OF DATE: 20230516 DATE AS OF CHANGE: 20230516 SUBJECT COMPANY: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 FILING VALUES: FORM TYPE: 144 SEC ACT: 1933 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 23928640 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 REPORTING-OWNER: COMPANY DATA: COMPANY CONFORMED NAME: BREWER KEVIN J CENTRAL INDEX KEY: 0001314431 FILING VALUES: FORM TYPE: 144 MAIL ADDRESS: STREET 1: AXCELIS TECHNOLOGIES, INC. STREET 2: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01938 144 1 primary_doc.xml 144 0001314431 XXXXXXXX LIVE 0001113232 AXCELIS TECHNOLOGIES, INC 000-30941 108 Cherry Hill Drive Beverly MA 01915 978-787-4000 KEVIN J BREWER Officer Common Morgan Stanley Smith Barney LLC Executive Financial Services

1 New York Plaza 38th Floor New York NY 10004

6505 851144.12 32711130 05/16/2023 NASDAQ Common 05/15/2022 Restricted Stock Vested under Issuer S-8 Registered Plan Issuer N 2313 05/15/2022 Not Applicable Common 05/15/2022 Restricted Stock Vested under Issuer S-8 Registered Plan Issuer N 2417 05/15/2022 Not Applicable Common 02/28/2022 Restricted Stock Vested under Issuer S-8 Registered Plan Issuer N 1775 02/28/2022 Not Applicable N KEVIN J BREWER

108 Cherry Hill Drive Beverly MA 01915

Common 05/11/2023 10546 1318932.33 05/16/2023 /s/ Kevin Joseph Brewer