0001950047-23-000503.txt : 20230510 0001950047-23-000503.hdr.sgml : 20230510 20230510162955 ACCESSION NUMBER: 0001950047-23-000503 CONFORMED SUBMISSION TYPE: 144 PUBLIC DOCUMENT COUNT: 1 FILED AS OF DATE: 20230510 DATE AS OF CHANGE: 20230510 SUBJECT COMPANY: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 FILING VALUES: FORM TYPE: 144 SEC ACT: 1933 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 23906955 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 REPORTING-OWNER: COMPANY DATA: COMPANY CONFORMED NAME: Lawson Douglas A. CENTRAL INDEX KEY: 0001420601 FILING VALUES: FORM TYPE: 144 MAIL ADDRESS: STREET 1: 21 VILLAGE VIEW ROAD CITY: WESTFORD STATE: MA ZIP: 01886 144 1 primary_doc.xml 144 0001420601 XXXXXXXX LIVE 0001113232 AXCELIS TECHNOLOGIES, INC 000-30941 108 Cherry Hill Drive Beverly MA 01915 978-787-4000 DOUGLAS LAWSON Officer Common Morgan Stanley Smith Barney LLC Executive Financial Services

1 New York Plaza 38th Floor New York NY 10004

5734 699548.00 32711130 05/10/2023 NASD Common 02/28/2023 Restricted Stock Vested under Issuer S-8 Registered Plan Issuer N 5734 02/28/2023 Not Applicable N Douglas Lawson

108 Cherry Hill Drive Beverly MA 01915

Common 02/13/2023 1998 244688.00 05/10/2023 /s/ Douglas Lawson