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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-22-016292
Filing Date
2022-11-03
Accepted
2022-11-03 17:12:28
Documents
72
Period of Report
2022-09-30

Document Format Files

Seq Description Document Type Size
1 10-Q acls-20220930x10q.htm   iXBRL 10-Q 2077498
2 EX-10.1 acls-20220930xex10d1.htm EX-10.1 57108
3 EX-31.1 acls-20220930xex31d1.htm EX-31.1 12615
4 EX-31.2 acls-20220930xex31d2.htm EX-31.2 13056
5 EX-32.1 acls-20220930xex32d1.htm EX-32.1 6841
6 EX-32.2 acls-20220930xex32d2.htm EX-32.2 6067
  Complete submission text file 0001558370-22-016292.txt   7451270

Data Files

Seq Description Document Type Size
7 EX-101.SCH acls-20220930.xsd EX-101.SCH 40748
8 EX-101.CAL acls-20220930_cal.xml EX-101.CAL 69344
9 EX-101.DEF acls-20220930_def.xml EX-101.DEF 147499
10 EX-101.LAB acls-20220930_lab.xml EX-101.LAB 387516
11 EX-101.PRE acls-20220930_pre.xml EX-101.PRE 273954
66 EXTRACTED XBRL INSTANCE DOCUMENT acls-20220930x10q_htm.xml XML 1413085
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 221359095
SIC: 3559 Special Industry Machinery, NEC