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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-22-012118
Filing Date
2022-08-04
Accepted
2022-08-04 12:21:17
Documents
70
Period of Report
2022-06-30

Document Format Files

Seq Description Document Type Size
1 10-Q acls-20220630x10q.htm   iXBRL 10-Q 1964308
2 EX-10.1 acls-20220630xex10d1.htm EX-10.1 99738
3 EX-31.1 acls-20220630xex31d1.htm EX-31.1 12612
4 EX-31.2 acls-20220630xex31d2.htm EX-31.2 13053
5 EX-32.1 acls-20220630xex32d1.htm EX-32.1 6838
6 EX-32.2 acls-20220630xex32d2.htm EX-32.2 6064
  Complete submission text file 0001558370-22-012118.txt   7254767

Data Files

Seq Description Document Type Size
7 EX-101.SCH acls-20220630.xsd EX-101.SCH 39378
8 EX-101.CAL acls-20220630_cal.xml EX-101.CAL 68361
9 EX-101.DEF acls-20220630_def.xml EX-101.DEF 146837
10 EX-101.LAB acls-20220630_lab.xml EX-101.LAB 380570
11 EX-101.PRE acls-20220630_pre.xml EX-101.PRE 269387
64 EXTRACTED XBRL INSTANCE DOCUMENT acls-20220630x10q_htm.xml XML 1369703
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 221135599
SIC: 3559 Special Industry Machinery, NEC