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Present value of lessee's discounted obligation for lease payments from finance lease, classified as noncurrent.

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 45
-Paragraph 1
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=123391704&loc=SL77918627-209977

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Term of lessee's operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
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-Section 50
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-URI http://asc.fasb.org/extlink&oid=123408670&loc=SL77918673-209980

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The total amount of the contingent obligation under letters of credit outstanding as of the reporting date.

No definition available.

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Fair value of the amount outstanding under the credit facility.

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 825
-SubTopic 10
-Section 50
-Paragraph 10
-URI http://asc.fasb.org/extlink&oid=123594938&loc=d3e13433-108611

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Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility.

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 210
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SX 210.5-02.19(b),22(b))
-URI http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682

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The cash inflow from the sale of formerly productive land held for sale, anything permanently fixed to it, including buildings, structures on it, and so forth.

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
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-Paragraph 12
-Subparagraph (c)
-URI http://asc.fasb.org/extlink&oid=123570139&loc=d3e3179-108585

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The amount of an asset, typically cash, provided to a counterparty to provide certain assurance of performance by the entity pursuant to the terms of a written or oral agreement, such as a lease.

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-Name Accounting Standards Codification
-Topic 210
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-Paragraph 1
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Name:	us-gaap_SecurityDeposit
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Name:	srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember
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Data Type:	na
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Name:	srt_CounterpartyNameAxis=acls_SiliconValleyBankMember
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Data Type:	na
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