Business Segment and Geographic Region Information - Revenue by Product Line (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2021	Dec. 31, 2020	Dec. 31, 2019
Revenue by product lines
Total revenue	$ 662,428	$ 474,560	$ 342,958
Ion implantation systems and services
Revenue by product lines
Total revenue	645,504	456,788	326,029
Other systems and services
Revenue by product lines
Total revenue	$ 16,924	$ 17,772	$ 16,929