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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-21-006110
Filing Date
2021-05-06
Accepted
2021-05-06 10:45:50
Documents
72
Period of Report
2021-03-31

Document Format Files

Seq Description Document Type Size
1 10-Q acls-20210331x10q.htm   iXBRL 10-Q 1487406
2 EX-10.1 acls-20210331xex10d1.htm EX-10.1 76668
3 EX-31.1 acls-20210331xex31d1.htm EX-31.1 12609
4 EX-31.2 acls-20210331xex31d2.htm EX-31.2 13050
5 EX-33.1 acls-20210331xex33d1.htm EX-33.1 6835
6 EX-33.2 acls-20210331xex33d2.htm EX-33.2 6061
  Complete submission text file 0001558370-21-006110.txt   6176466

Data Files

Seq Description Document Type Size
7 EX-101.SCH acls-20210331.xsd EX-101.SCH 40583
8 EX-101.CAL acls-20210331_cal.xml EX-101.CAL 68282
9 EX-101.DEF acls-20210331_def.xml EX-101.DEF 126441
10 EX-101.LAB acls-20210331_lab.xml EX-101.LAB 408450
11 EX-101.PRE acls-20210331_pre.xml EX-101.PRE 284759
12 EXTRACTED XBRL INSTANCE DOCUMENT acls-20210331x10q_htm.xml XML 1110578
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 21896401
SIC: 3559 Special Industry Machinery, NEC