0001415889-24-013222.txt : 20240515 0001415889-24-013222.hdr.sgml : 20240515 20240515161534 ACCESSION NUMBER: 0001415889-24-013222 CONFORMED SUBMISSION TYPE: 4 PUBLIC DOCUMENT COUNT: 1 CONFORMED PERIOD OF REPORT: 20240515 FILED AS OF DATE: 20240515 DATE AS OF CHANGE: 20240515 REPORTING-OWNER: OWNER DATA: COMPANY CONFORMED NAME: St Dennis Thomas CENTRAL INDEX KEY: 0001339595 ORGANIZATION NAME: FILING VALUES: FORM TYPE: 4 SEC ACT: 1934 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 24950945 MAIL ADDRESS: STREET 1: C/O FORMFACTOR, INC. STREET 2: 7005 SOUTHFRONT ROAD CITY: LIVERMORE STATE: CA ZIP: 94551 ISSUER: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] ORGANIZATION NAME: 06 Technology IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 4 1 form4-05152024_040526.xml X0508 4 2024-05-15 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001339595 St Dennis Thomas C/O AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915 true false false false 0 Common Stock 2024-05-15 4 A 0 1162 0 A 13069 D These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2024. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2025. Of the shares held as of May 15, 2024, 1,162 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture. /s/ Lynnette C. Fallon, Attorney-in-Fact 2024-05-15