0001415889-24-005162.txt : 20240226 0001415889-24-005162.hdr.sgml : 20240226 20240226081507 ACCESSION NUMBER: 0001415889-24-005162 CONFORMED SUBMISSION TYPE: 4 PUBLIC DOCUMENT COUNT: 1 CONFORMED PERIOD OF REPORT: 20240223 FILED AS OF DATE: 20240226 DATE AS OF CHANGE: 20240226 REPORTING-OWNER: OWNER DATA: COMPANY CONFORMED NAME: Lawson Douglas A. CENTRAL INDEX KEY: 0001420601 ORGANIZATION NAME: FILING VALUES: FORM TYPE: 4 SEC ACT: 1934 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 24673630 MAIL ADDRESS: STREET 1: 21 VILLAGE VIEW ROAD CITY: WESTFORD STATE: MA ZIP: 01886 ISSUER: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] ORGANIZATION NAME: 06 Technology IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 4 1 form4-02262024_080202.xml X0508 4 2024-02-23 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001420601 Lawson Douglas A. C/O AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915 false true false false EVP, CORPORATE MKTG & STRATEGY 0 Common Stock 2024-02-23 4 P 0 500 111.04 A 19648 D Of the shares held as of February 23, 2024, 16,644 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture. /s/ Lynnette C. Fallon, Attorney-in-Fact 2024-02-23