0001209191-21-033168.txt : 20210517 0001209191-21-033168.hdr.sgml : 20210517 20210517163503 ACCESSION NUMBER: 0001209191-21-033168 CONFORMED SUBMISSION TYPE: 4 PUBLIC DOCUMENT COUNT: 1 CONFORMED PERIOD OF REPORT: 20210517 FILED AS OF DATE: 20210517 DATE AS OF CHANGE: 20210517 REPORTING-OWNER: OWNER DATA: COMPANY CONFORMED NAME: Chiu Tzu Yin CENTRAL INDEX KEY: 0001738290 FILING VALUES: FORM TYPE: 4 SEC ACT: 1934 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 21931443 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 ISSUER: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 4 1 doc4.xml FORM 4 SUBMISSION X0306 4 2021-05-17 0 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001738290 Chiu Tzu Yin C/O AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01982 1 0 0 0 Common Stock 2021-05-17 4 A 0 3497 0.00 A 27884 D These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 17, 2021. Of the shares held after this grant on of May 17, 2021, 4,907 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture. Lynnette C. Fallon, as attorney in fact for Tzu Yin Chiu 2021-05-17