0001209191-21-033168.txt : 20210517
0001209191-21-033168.hdr.sgml : 20210517
20210517163503
ACCESSION NUMBER: 0001209191-21-033168
CONFORMED SUBMISSION TYPE: 4
PUBLIC DOCUMENT COUNT: 1
CONFORMED PERIOD OF REPORT: 20210517
FILED AS OF DATE: 20210517
DATE AS OF CHANGE: 20210517
REPORTING-OWNER:
OWNER DATA:
COMPANY CONFORMED NAME: Chiu Tzu Yin
CENTRAL INDEX KEY: 0001738290
FILING VALUES:
FORM TYPE: 4
SEC ACT: 1934 Act
SEC FILE NUMBER: 000-30941
FILM NUMBER: 21931443
MAIL ADDRESS:
STREET 1: 108 CHERRY HILL DRIVE
CITY: BEVERLY
STATE: MA
ZIP: 01915
ISSUER:
COMPANY DATA:
COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC
CENTRAL INDEX KEY: 0001113232
STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559]
IRS NUMBER: 341818596
STATE OF INCORPORATION: DE
FISCAL YEAR END: 1231
BUSINESS ADDRESS:
STREET 1: 108 CHERRY HILL DRIVE
CITY: BEVERLY
STATE: MA
ZIP: 01915
BUSINESS PHONE: 978-787-4000
MAIL ADDRESS:
STREET 1: 108 CHERRY HILL DRIVE
CITY: BEVERLY
STATE: MA
ZIP: 01915
FORMER COMPANY:
FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC
DATE OF NAME CHANGE: 20000501
4
1
doc4.xml
FORM 4 SUBMISSION
X0306
4
2021-05-17
0
0001113232
AXCELIS TECHNOLOGIES INC
ACLS
0001738290
Chiu Tzu Yin
C/O AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE
BEVERLY
MA
01982
1
0
0
0
Common Stock
2021-05-17
4
A
0
3497
0.00
A
27884
D
These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 17, 2021.
Of the shares held after this grant on of May 17, 2021, 4,907 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.
Lynnette C. Fallon, as attorney in fact for Tzu Yin Chiu
2021-05-17