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Form 3 - Initial statement of beneficial ownership of securities:
SEC Accession No. 0001209191-15-042162
Filing Date
2015-05-13
Accepted
2015-05-13 14:25:07
Documents
2
Period of Report
2015-05-13

Document Format Files

Seq Description Document Type Size
1 FORM 3 SUBMISSION doc3.html 3  
1 FORM 3 SUBMISSION doc3.xml 3 2157
2 EX-24.1 DOCUMENT attachment1.htm EX-24.1 2387
  Complete submission text file 0001209191-15-042162.txt   5960
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 14242 S CANYON DR PHOENIX AZ 85048
Business Address
FAUBERT RICHARD J (Reporting) CIK: 0001230508 (see all company filings)

Type: 3 | Act: 34 | File No.: 000-30941 | Film No.: 15857748