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Filing Detail
Form 4 - Statement of changes in beneficial ownership of securities:
SEC Accession No. 0001209191-23-009084
Filing Date
2023-02-14
Accepted
2023-02-14 16:00:53
Documents
1
Period of Report
2023-02-14

Document Format Files

Seq Description Document Type Size
1 FORM 4 SUBMISSION doc4.html 4  
1 FORM 4 SUBMISSION doc4.xml 4 3905
  Complete submission text file 0001209191-23-009084.txt   5320
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address
Chiu Tzu Yin (Reporting) CIK: 0001738290 (see all company filings)

Type: 4 | Act: 34 | File No.: 000-30941 | Film No.: 23628466