-----BEGIN PRIVACY-ENHANCED MESSAGE----- Proc-Type: 2001,MIC-CLEAR Originator-Name: webmaster@www.sec.gov Originator-Key-Asymmetric: MFgwCgYEVQgBAQICAf8DSgAwRwJAW2sNKK9AVtBzYZmr6aGjlWyK3XmZv3dTINen TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB MIC-Info: RSA-MD5,RSA, VpOAGzjdhtkWjoJcp6712q6+MpV6pAJYPeReUCLL1DJbP2I5aDx50YaQVznZeIYc okj67IQs5VKgBkfDG8IZGQ== 0001181431-03-027440.txt : 20031024 0001181431-03-027440.hdr.sgml : 20031024 20031024084529 ACCESSION NUMBER: 0001181431-03-027440 CONFORMED SUBMISSION TYPE: 3 PUBLIC DOCUMENT COUNT: 2 CONFORMED PERIOD OF REPORT: 20031023 FILED AS OF DATE: 20031024 REPORTING-OWNER: OWNER DATA: COMPANY CONFORMED NAME: FLETCHER R JOHN CENTRAL INDEX KEY: 0001215024 FILING VALUES: FORM TYPE: 3 SEC ACT: 1934 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 03955256 BUSINESS ADDRESS: STREET 1: FLETCHER SPAGHT INC STREET 2: 222 BERKLEY ST. CITY: BOSTON STATE: MA ZIP: 02116 ISSUER: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 BUSINESS ADDRESS: STREET 1: 55 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 9782324001 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 3 1 rrd20540.xml FORM 3 FLETCHER X0201 32003-10-23 1 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001215024 FLETCHER R JOHN 108 CHERRY HILL DRIVE BEVERLY MA 01915 1000Mr. Fletcher does not own any reportable securities, directly or indirectly. Power of Attoney filed as an Exhibit 24 hereto.Lynnette C. Fallon, as Attorney-in-Fact for R. John Fletcher2003-10-24 EX-24. 3 rrd12393_14222.htm POWER OF ATTORNEY rrd12393_14222.html 

POWER OF ATTORNEY
For Executing Reports under Section 16(a)
with respect to securities of
AXCELIS TECHNOLOGIES INC.
	The undersigned hereby constitutes and appoints each of Lynnette C. Fallon, Mary G. Puma, Matthew C. Dallett and Stanley Keller, each acting singly, the undersigned's true and lawful attorney-in-fact, from the date hereof until this Power of Attorney is revoked, to:
(1)	execute, for and on behalf of the undersigned, Forms 3, 4 and 5 with respect to securities of Axcelis Technologies, Inc. in accordance with Section 16(a) of the Securities Exchange Act of 1934 and the rules thereunder, it being understood that the documents executed by such attorney-in-fact on behalf of the undersigned pursuant to this Power of Attorney shall be in such form and shall contain such terms and conditions as such attorney-in-fact may approve in his or her discretion; and
(2)	do and perform any and all acts, for and on behalf of the undersigned, that may be necessary or desirable to complete the execution of any such Form 3, 4 or 5 and the timely filing of such form with the United States Securities and Exchange Commission and any other authority.
	The undersigned hereby grants to each such attorney-in-fact full power and authority to do and perform all and every act and thing whatsoever requisite, necessary and proper to be done in the exercise of any of the rights and powers herein granted, as fully for all intents and purposes as the undersigned might or could do if personally present, with full power of substitution or revocation, hereby ratifying and confirming all that such attorney-in-fact, or his or her substitute or substitutes, shall lawfully do or cause to be done by virtue of this power of attorney and the rights and powers herein granted.  The undersigned acknowledges that the foregoing attorneys-in-fact, in serving in such capacity at the request of the undersigned, are not assuming any of the undersigned's responsibilities to comply with Section 16 of the Securities Exchange Act of 1934.
	IN WITNESS WHEREOF, the undersigned has caused this Power of Attorney to be executed this __ day of _______, 2003.



						___________________________________
						John Fletcher


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