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Form 4 - Statement of changes in beneficial ownership of securities:
SEC Accession No. 0001181431-07-002790
Filing Date
2007-01-09
Accepted
2007-01-09 10:52:39
Documents
1
Period of Report
2006-12-29

Document Format Files

Seq Description Document Type Size
1 HALTERMAN DEC 2006 ESPP rrd142425.html 4  
1 HALTERMAN DEC 2006 ESPP rrd142425.xml 4 3159
  Complete submission text file 0001181431-07-002790.txt   5055
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 978-787-4000
Halterman Craig M (Reporting) CIK: 0001327116 (see all company filings)

Type: 4 | Act: 34 | File No.: 000-30941 | Film No.: 07519304