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Form 3 - Initial statement of beneficial ownership of securities:
SEC Accession No. 0001181431-06-062605
Filing Date
2006-11-09
Accepted
2006-11-09 10:15:07
Documents
2
Period of Report
2006-11-08

Document Format Files

Seq Description Document Type Size
1 WILD FORM 3 rrd135161.html 3  
1 WILD FORM 3 rrd135161.xml 3 1622
2 POWER OF ATTORNEY rrd118637_133516.htm EX-24. 2479
  Complete submission text file 0001181431-06-062605.txt   5982
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 978-787-4000
WILD GEOFFREY (Reporting) CIK: 0001379529 (see all company filings)

Type: 3 | Act: 34 | File No.: 000-30941 | Film No.: 061199874