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Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001113232-04-000002
Filing Date
2004-03-08
Accepted
2004-03-08 15:18:31
Documents
11
Period of Report
2003-12-31

Document Format Files

Seq Description Document Type Size
1 AXCELIS TECHNOLOGIES, INC. FORM 10-K form10k.htm 10-K 591802
3 2000 STOCK PLAN ex10_1.txt EX-10 55411
4 EXEC. OFFICER AGREEMENT ex10_10.txt EX-10 14620
5 SUBSIDIARIES ex21_1.txt EX-21 1347
6 CONSENT OF ERNST & YOUNG LLP ex23_1.txt EX-23 734
7 SECTION 302 CERTIFICATION OF CEO ex31_1.htm EX-31 4037
8 SECTION 302 CERTIFICATION OF CFO ex31_2.htm EX-31 4065
9 SECTION 906 CERTIFICATION OF CEO ex32_1.htm EX-32 1862
10 SECTION 906 CERTIFICATION OF CFO ex32_2.htm EX-32 1874
11 FACTORS AFFECTING FUTURE OPERATING RESULTS ex99_1.txt EX-99 23141
12 GOVERNANCE POLICIES ex99_3.txt EX-99 5193
  Complete submission text file 0001113232-04-000002.txt   706831
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-30941 | Film No.: 04654694
SIC: 3559 Special Industry Machinery, NEC