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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001113232-03-000012
Filing Date
2003-11-14
Accepted
2003-11-14 15:35:40
Documents
6
Period of Report
2003-09-30

Document Format Files

Seq Description Document Type Size
1 AXCELIS TECHNOLOGIES, INC. FORM 10-Q q303form10q.htm 10-Q 202956
3 SECTION 302 CERTIFICATION ex31_1.htm EX-31 4042
4 SECTION 302 CERTIFICATION ex31_2.htm EX-31 4070
5 SECTION 906 CERTIFICATION ex32_1.htm EX-32 1869
6 SECTION 906 CERTIFICATION ex32_2.htm EX-32 1881
7 FACTORS AFFECTING FUTURE OPERATING RESULTS ex99_1.txt EX-99 23775
  Complete submission text file 0001113232-03-000012.txt   240728
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 031004182
SIC: 3559 Special Industry Machinery, NEC