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Filing Detail
Form 10-K/A - Annual report [Section 13 and 15(d), not S-K Item 405]: [Amend]
SEC Accession No. 0001113232-03-000007
Filing Date
2003-06-30
Accepted
2003-06-30 10:40:49
Documents
4
Period of Report
2002-12-31

Document Format Files

Seq Description Document Type Size
1 AXCELIS TECHNOLOGIES, INC. FORM 10-K/A form10ka_2002.htm 10-K/A 283682
3 CONSENT OF ERNST & YOUNG, INDEPENDENT AUDITORS ex23_2.txt EX-23 890
4 CERTIFICATION ex99_2.htm EX-99 1864
5 CERTIFICATION ex99_3.htm EX-99 1876
  Complete submission text file 0001113232-03-000007.txt   290192
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K/A | Act: 34 | File No.: 000-30941 | Film No.: 03762867
SIC: 3559 Special Industry Machinery, NEC