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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001113232-03-000005
Filing Date
2003-05-15
Accepted
2003-05-15 11:55:49
Documents
4
Period of Report
2003-03-31

Document Format Files

Seq Description Document Type Size
1 FORM 10-Q acls10q.htm 10-Q 157917
3 EXHIBIT 99.1 ex99_1.txt EX-99 24077
4 CERTIFICATION ex99_2.htm EX-99 1864
5 CERTIFICATION ex99_3.htm EX-99 1886
  Complete submission text file 0001113232-03-000005.txt   187549
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 03702269
SIC: 3559 Special Industry Machinery, NEC