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Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001113232-03-000002
Filing Date
2003-03-28
Accepted
2003-03-28 14:12:54
Documents
11
Period of Report
2002-12-31

Document Format Files

Seq Description Document Type Size
1 AXCELIS TECHNOLOGIES, INC. FORM 10-K form10k.htm 10-K 581250
3 ETHICAL BUSINESS CONDUCT AT AXCELIS ex14_1.txt EX-14 9999
4 SUBSIDIARIES OF AXCELIS ex21_1.txt EX-21 1487
5 CONSENT OF ERNST & YOUNG, LLP ex23_1.txt EX-99 862
6 FACTORS AFFECTING FUTURE OPERATING RESULTS ex99_1.txt EX-99 25894
7 CERTIFICATION OF CHIEF EXECUTIVE OFFICER ex99_2.htm EX-99 1863
8 CERTIFICATION OF CHIEF FINANCIAL OFFICER ex99_3.htm EX-99 1885
9 CHARTER OF AUDIT COMMITTEE ex99_4.txt EX-99 10020
10 GOVERNANCE POLICIES ex99_5.txt EX-99 4215
11 CHARTER OF THE NOMINATING AND GOVERNANCE COMMITTEE ex99_6.txt EX-99 3454
12 CHARTER OF THE COMPENSATION COMMITTEE ex99_7.txt EX-99 5458
  Complete submission text file 0001113232-03-000002.txt   649205
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-30941 | Film No.: 03624343
SIC: 3559 Special Industry Machinery, NEC