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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001113232-02-000010
Filing Date
2002-11-14
Accepted
2002-11-14 12:15:12
Documents
4
Period of Report
2002-09-30

Document Format Files

Seq Description Document Type Size
1 AXCELIS TECHNOLOGIES, INC. FORM 10-Q form10q.htm 10-Q 176663
3 CERTIFICATION ex99_1.htm EX-99 1869
4 CERTIFICATION ex99_2.htm EX-99 1891
5 EXHIBIT 99 ex99_3.txt EX-99 28738
  Complete submission text file 0001113232-02-000010.txt   210991
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 02823029
SIC: 3559 Special Industry Machinery, NEC