EXHIBIT 23.2



               CONSENT OF ERNST & YOUNG LLP, INDEPENDENT AUDITORS

    We consent to the incorporation by reference in the Registration Statement
(Form S-3 No. 333-85214) of Axcelis Technologies, Inc. and related Prospectus,
the Registration Statement (Form S-8 No 333-49726) pertaining to the Axcelis
Technologies, Inc. Employee Stock Purchase Plan and the Registration Statement
(Form S-8 No. 333-46768) pertaining to the Axcelis Technologies, Inc. 2000
Stock Plan, of our report dated April 26, 2002, with respect to the
consolidated financial statements of Sumitomo Eaton Nova Corporation included
in the Axcelis Technologies, Inc. amended Annual Report (Form 10-K/A) for
the year ended December 31, 2001.




                                        /s/ ERNST & YOUNG LLP

Tokyo, Japan
June 24, 2002