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Form SD - Specialized disclosure report:
SEC Accession No. 0001104659-21-068833
Filing Date
2021-05-18
Accepted
2021-05-18 16:06:55
Documents
2

Document Format Files

Seq Description Document Type Size
1 SD a21-16509_1sd.htm SD 26323
2 EX-1.01 a21-16509_1ex1d01.htm EX-1.01 24340
  Complete submission text file 0001104659-21-068833.txt   51798
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: SD | Act: 34 | File No.: 000-30941 | Film No.: 21936007
SIC: 3559 Special Industry Machinery, NEC