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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-14-058705
Filing Date
2014-08-08
Accepted
2014-08-08 11:43:53
Documents
12
Period of Report
2014-06-30

Document Format Files

Seq Description Document Type Size
1 10-Q a14-13878_110q.htm 10-Q 916987
2 EX-10.1 a14-13878_1ex10d1.htm EX-10.1 28719
3 EX-31.1 a14-13878_1ex31d1.htm EX-31.1 12826
4 EX-31.2 a14-13878_1ex31d2.htm EX-31.2 12838
5 EX-32.1 a14-13878_1ex32d1.htm EX-32.1 5202
6 EX-32.2 a14-13878_1ex32d2.htm EX-32.2 5213
  Complete submission text file 0001104659-14-058705.txt   3865158

Data Files

Seq Description Document Type Size
7 XBRL INSTANCE DOCUMENT acls-20140630.xml EX-101.INS 438437
8 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT acls-20140630.xsd EX-101.SCH 26679
9 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT acls-20140630_cal.xml EX-101.CAL 50203
10 XBRL TAXONOMY EXTENSION LABELS LINKBASE DOCUMENT acls-20140630_lab.xml EX-101.LAB 303483
11 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT acls-20140630_pre.xml EX-101.PRE 205042
12 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT acls-20140630_def.xml EX-101.DEF 72973
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 141026304
SIC: 3559 Special Industry Machinery, NEC