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Filing Detail
Form S-8 - Securities to be offered to employees in employee benefit plans:
SEC Accession No. 0001104659-14-040903
Filing Date
2014-05-22
Accepted
2014-05-22 10:00:38
Documents
3
Effectiveness Date
2014-05-22

Document Format Files

Seq Description Document Type Size
1 S-8 a14-13028_1s8.htm S-8 94156
2 EX-5.1 a14-13028_1ex5d1.htm EX-5.1 5199
3 EX-23.2 a14-13028_1ex23d2.htm EX-23.2 2910
  Complete submission text file 0001104659-14-040903.txt   103346
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: S-8 | Act: 33 | File No.: 333-196157 | Film No.: 14862434
SIC: 3559 Special Industry Machinery, NEC