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Inventories, net (Details) (USD $)
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3 Months Ended | ||
|---|---|---|---|
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Mar. 31, 2014
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Mar. 31, 2013
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Dec. 31, 2013
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| Inventories, net | |||
| Raw materials | $ 57,809,000 | $ 56,942,000 | |
| Work in process | 29,064,000 | 27,462,000 | |
| Finished goods (completed systems) | 8,660,000 | 11,385,000 | |
| Inventories, net | 95,533,000 | 95,789,000 | |
| Inventories, net | |||
| Cost of sales due to below normal production capacity | 0 | 500,000 | |
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Dry strip product line, intellectual property rights and certain assets
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| Inventories, net | |||
| Inventory reserves | $ 24,600,000 | $ 2,100,000 | $ 25,100,000 |
| Size of dry strip wafer equipment and products, Company license to make and sell (in millimeters) | 300 | ||
| X | ||||||||||
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- Definition
Represents the amount charged to cost of sales due to below normal production capacity. No definition available.
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| X | ||||||||||
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- Definition
Represents the size of dry strip wafer processing equipment for which the entity was granted a license to make and sell. No definition available.
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| X | ||||||||||
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- Details
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| X | ||||||||||
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- Definition
Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of merchandise or goods held by the company that are readily available for sale. Reference 1: http://www.xbrl.org/2003/role/presentationRef
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| X | ||||||||||
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- Details
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| X | ||||||||||
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- Definition
Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer. Reference 1: http://www.xbrl.org/2003/role/presentationRef
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| X | ||||||||||
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- Definition
Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of unprocessed items to be consumed in the manufacturing or production process. Reference 1: http://www.xbrl.org/2003/role/presentationRef
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| X | ||||||||||
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- Definition
Amount of valuation reserve for inventory. Reference 1: http://www.xbrl.org/2003/role/presentationRef
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| X | ||||||||||
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- Definition
Carrying amount, net of reserves and adjustments, as of the balance sheet date of merchandise or goods which are partially completed. This inventory is generally comprised of raw materials, labor and factory overhead costs, which require further materials, labor and overhead to be converted into finished goods, and which generally require the use of estimates to determine percentage complete and pricing. Reference 1: http://www.xbrl.org/2003/role/presentationRef
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