Inventories, net (Details) (USD $)	3 Months Ended		9 Months Ended			3 Months Ended
	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012	Dec. 31, 2012	Mar. 31, 2013 Dry strip product line, intellectual property rights and certain assets mm	Sep. 30, 2013 Dry strip product line, intellectual property rights and certain assets
Inventories, net
Raw materials	$ 58,265,000		$ 58,265,000		$ 72,013,000
Work in process	22,622,000		22,622,000		12,253,000
Finished goods (completed systems)	13,429,000		13,429,000		15,968,000
Inventories, net	94,316,000		94,316,000		100,234,000
Inventory reserves	34,400,000		34,400,000		33,600,000		2,100,000
Inventories, net
Cost of sales due to non-recoverable inventory components	34,400,000		34,400,000		33,600,000		2,100,000
Size of dry strip wafer equipment and products, Company license to make and sell (in millimeters)						300
Cost of sales due to below normal production capacity	$ 100,000	$ 1,100,000	$ 600,000	$ 1,200,000